Development Trends and Perspectives of Future Sensors and MEMS/NEMS

Jianxiong Zhu, Xinmiao Liu, Qiongfeng Shi, Tianyiyi He, Zhongda Sun, Xinge Guo, Weixin Liu, Othman Bin Sulaiman, Bowei Dong, Chengkuo Lee
Journal
ISSN / E-ISSN
— / —
DOI
10.3390/mi11010007 ↗
Volume · Issue · Pages
11 · 1 · 7-7
Publisher
Multidisciplinary Digital Publishing Institute (MDPI)
Article URL
http://dx.doi.org/10.3390/mi11010007 ↗
Article details
Unverified
Publication date (each date has its type and source)
18 Dec 2019
OpenAlex publication date · source: OpenAlex
Dates on record for this article
TypeDateSource
OpenAlex publication date18 Dec 2019 OpenAlex

Keywords (as given): MEMS; nanoelectromechanical systems; MEMS sensors; MEMS fabrication; MEMS gas sensor; MEMS acoustic sensor; piezoelectric micromachined ultrasonic transducers; MEMS energy harvesting; MEMS switches; Internet of Things; wearable sensors; flexible substrates; low-power sensors; event-based sensors; artificial intelligence; virtual reality; 5G

HEC Status at Publication Not the journal's current status

HEC Status at PublicationNot conclusive
Best available information, not a definitive status: HEC status cannot be determined for this date: no HEC list is recorded as in effect on it.
Journal
Micromachines
Publication date used
18 Dec 2019 (OpenAlex publication date)
Applicable HEC period
None recorded for this date
Category
—
Recognition status
Unknown (NO_PERIOD_FOR_DATE)
Source
—
Verification status
Not available
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